Invention Grant
- Patent Title: Method for the bonding and debonding of substrates
-
Application No.: US15749960Application Date: 2016-10-24
-
Publication No.: US10468286B2Publication Date: 2019-11-05
- Inventor: Jurgen Burggraf , Harald Wiesbauer
- Applicant: EV Group E. Thallner GmbH
- Applicant Address: AT St. Florian am Inn
- Assignee: EV Group E. Thallner GmbH
- Current Assignee: EV Group E. Thallner GmbH
- Current Assignee Address: AT St. Florian am Inn
- Agency: Kusner & Jaffe
- Priority: DE102015118742 20151102
- International Application: PCT/EP2016/075571 WO 20161024
- International Announcement: WO2017/076682 WO 20170511
- Main IPC: B32B43/00
- IPC: B32B43/00 ; H01L21/683 ; H01L23/00 ; B32B38/10

Abstract:
A method for bonding a product substrate to a carrier substrate via a connection layer, wherein a soluble layer is applied between the connection layer and the product substrate, and wherein a) the soluble layer is soluble due to an interaction with an electromagnetic radiation of a radiation source, and b) the connection layer and the carrier substrate are at least predominantly transparent to the electromagnetic radiation. A method for debonding a product substrate from a carrier substrate bonded to the product substrate via a connection layer, wherein a soluble layer is applied between the connection layer and the product substrate, and wherein a) the soluble layer is dissolved through an interaction with an electromagnetic radiation of a radiation source, and b) the connection layer and the carrier substrate are at least predominantly transparent to the electromagnetic radiation. A corresponding product-substrate-to-carrier-substrate bond is also disclosed.
Public/Granted literature
- US20180233394A1 METHOD FOR THE BONDING AND DEBONDING OF SUBSTRATES Public/Granted day:2018-08-16
Information query