Invention Grant
- Patent Title: Shutter disk for physical vapor deposition chamber
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Application No.: US15245004Application Date: 2016-08-23
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Publication No.: US10468292B2Publication Date: 2019-11-05
- Inventor: Karl M. Brown , Jason Schaller
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: C23C16/00
- IPC: C23C16/00 ; H01L21/687 ; H01J37/32 ; H01L21/67 ; C23C14/50
Abstract:
A shutter disk suitable for shield a substrate support in a physical vapor deposition chamber is provided. In one embodiment, the shutter disk includes a disk-shaped body having an outer diameter disposed between a top surface and a bottom surface. The disk-shape body includes a double step connecting the bottom surface to the outer diameter.
Public/Granted literature
- US20160358809A1 SHUTTER DISK FOR PHYSICAL VAPOR DEPOSITION CHAMBER Public/Granted day:2016-12-08
Information query
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