Invention Grant
- Patent Title: Advanced interconnects containing an IMT liner
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Application No.: US15948809Application Date: 2018-04-09
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Publication No.: US10468346B2Publication Date: 2019-11-05
- Inventor: Joseph F. Maniscalco , Andrew Tae Kim , Baozhen Li , Chih-Chao Yang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Alvin Borromeo, Esq.
- Main IPC: H01L23/525
- IPC: H01L23/525 ; H01L23/532 ; H01L21/768

Abstract:
An interconnect structure is provided that includes a liner located between an electrically conductive structure and an interconnect dielectric material layer. The liner is composed of a phase change material that is insulating at a first temperature, and becomes conductive at a second temperature that is higher than the first temperature. The liner that is composed of such a phase change material is referred to as an “insulator-to/from metal transition (IMT)” liner. In the present application, an entirety of, or a portion of, the IMT liner may be changed from an insulating phase to a conductive phase by increasing the temperature (i.e., heating) of the liner so as to provide a redundancy path in which electrons can flow.
Public/Granted literature
- US20190311985A1 ADVANCED INTERCONNECTS CONTAINING AN IMT LINER Public/Granted day:2019-10-10
Information query
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