Invention Grant
- Patent Title: Poly-insulator-poly (PIP) capacitor
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Application No.: US15877394Application Date: 2018-01-23
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Publication No.: US10468427B2Publication Date: 2019-11-05
- Inventor: Xinshu Cai , Shyue Seng Tan
- Applicant: GLOBALFOUNDRIES Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Thompson Hine LLP
- Agent Anthony Canale
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L27/11521 ; H01L49/02 ; H01L27/11526 ; H01L29/423

Abstract:
Devices and methods of forming a device are disclosed. A substrate is prepared with a memory region and a capacitor region. Split non-volatile memory (NVM) cell may be formed in the memory region and a capacitor may be formed in a capacitor region. The split NVM cell and the capacitor are formed with the same gate electrode and dielectric layers. The capacitor may be a poly-insulator-poly (PIP) which may include first and second capacitor control gate stacks or capacitor plates. In the case of capacitor control gate stacks, the capacitor is integrated into the device without the need of an additional mask. In the case of capacitor plates, the capacitor is integrated into the device with only one additional mask.
Public/Granted literature
- US20190229122A1 POLY-INSULATOR-POLY (PIP) CAPACITOR Public/Granted day:2019-07-25
Information query
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