Invention Grant
- Patent Title: Image sensor device and method for forming the same
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Application No.: US15807980Application Date: 2017-11-09
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Publication No.: US10468444B2Publication Date: 2019-11-05
- Inventor: Yun-Wei Cheng , Chun-Hao Chou , Kuo-Cheng Lee , Hsun-Ying Huang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
A method for forming an image sensor device is provided. The method includes forming a first trench in a semiconductor substrate. The semiconductor substrate has a front surface and a back surface, and the first trench extends from the front surface into the semiconductor substrate. The method includes forming a first isolation structure in the first trench. The method includes forming a light-sensing region in the semiconductor substrate. The first isolation structure surrounds the light-sensing region. The method includes forming a second trench in the semiconductor substrate. The second trench extends from the back surface into the semiconductor substrate and exposes the first isolation structure. The method includes forming a second isolation structure in the second trench. The second isolation structure includes a light-blocking structure to absorb or reflect incident light.
Public/Granted literature
- US20190140006A1 IMAGE SENSOR DEVICE AND METHOD FOR FORMING THE SAME Public/Granted day:2019-05-09
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