Invention Grant
- Patent Title: Piezoelectric module
-
Application No.: US15465630Application Date: 2017-03-22
-
Publication No.: US10469054B2Publication Date: 2019-11-05
- Inventor: Yutaka Kishimoto , Yasuyuki Ida , Hideaki Kobayashi
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: JP2014-220509 20141029
- Main IPC: H03H9/17
- IPC: H03H9/17 ; H03H3/02 ; H03H9/02 ; H03H9/05

Abstract:
A piezoelectric module includes a piezoelectric thin film, a fixing layer, and a support substrate. The piezoelectric thin film is supported by the support substrate with the fixing layer in between. Functional conductors are provided on a surface of the piezoelectric thin film. A void is provided in the fixing layer to include a region overlapping with the functional conductors. A conductor pattern defining a circuit element is provided in a region of the void on a surface of the support substrate on the fixing layer side.
Public/Granted literature
- US20170194933A1 PIEZOELECTRIC MODULE Public/Granted day:2017-07-06
Information query
IPC分类: