- Patent Title: Systems and methods for using computer-generated models to reduce reflected power towards a high frequency RF generator during a cycle of operations of a low frequency RF generator
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Application No.: US15098912Application Date: 2016-04-14
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Publication No.: US10469108B2Publication Date: 2019-11-05
- Inventor: Arthur M. Howald , John C. Valcore, Jr. , Andrew Fong , David Hopkins
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Penilla IP, APC
- Main IPC: G01R19/00
- IPC: G01R19/00 ; H04B1/04 ; G05B17/02 ; G06F17/50

Abstract:
Systems and methods for reducing reflected towards a higher frequency radio frequency (RF) generator during a period of a lower frequency RF generator and for using a relationship to reduce reflected power are described. By tuning the higher frequency RF generator during the period of the lower frequency RF generator, precise control of the higher frequency RF generator is achieved for reducing power reflected towards the higher frequency RF generator. Moreover, by using the relationship to reduce the reflected power, time is saved during processing of a wafer.
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