Invention Grant
- Patent Title: Scanning exposure device
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Application No.: US15551378Application Date: 2016-02-17
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Publication No.: US10469692B2Publication Date: 2019-11-05
- Inventor: Yuji Yoshida , Mineyuki Matsumoto , Toshinari Arai , Shigeki Tanaka , Keita Katayose , Hideyuki Suzuki , Makoto Kanbe
- Applicant: V TECHNOLOGY CO., LTD. , SHARP KABUSHIKI KAISHA
- Applicant Address: JP Kanagawa JP Osaka
- Assignee: V TECHNOLOGY CO., LTD.,SHARP KABUSHIKI KAISHA
- Current Assignee: V TECHNOLOGY CO., LTD.,SHARP KABUSHIKI KAISHA
- Current Assignee Address: JP Kanagawa JP Osaka
- Agency: Osha Liang LLP
- Priority: JP2015-030025 20150218
- International Application: PCT/JP2016/054518 WO 20160217
- International Announcement: WO2016/133103 WO 20160825
- Main IPC: H04N1/04
- IPC: H04N1/04 ; H04N1/028 ; H04N1/40 ; H04N1/401 ; G03F1/88

Abstract:
A scanning exposure device includes a stage that supports a substrate, wherein a space is provided between a stage surface and the substrate; a light source unit that radiates light to a light irradiation area that extends in one direction above the substrate; and a scanning device that moves one or both of the stage and the light source unit relatively in a scanning direction that intersects the one direction. The scanning device is provided with an acceleration zone from a position in which the stage and the light source unit are at a standstill to a position in which the substrate supported by the stage enters the light irradiation area. The stage comprises a light shielding member that covers the space between the stage surface and the substrate at an end part of the stage.
Public/Granted literature
- US20180041656A1 SCANNING EXPOSURE DEVICE Public/Granted day:2018-02-08
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