Invention Grant
- Patent Title: Advanced crack stop structure
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Application No.: US15938155Application Date: 2018-03-28
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Publication No.: US10475753B2Publication Date: 2019-11-12
- Inventor: Chih-Chao Yang , Baozhen Li , Xiao Hu Liu , Griselda Bonilla
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Jeffrey S LaBaw; Steven J Meyers; Alvin Borromeo
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L23/522 ; H01L21/768 ; H01L23/528

Abstract:
An integrated circuit (IC) structure includes an active area of the IC structure insulator positioned over a substrate. The active area includes an interconnection structure comprised of a plurality of levels, each of the interconnect structure levels including an interlayer dielectric (ILD) layer, a barrier layer disposed over the ILD and a conductor metal layer over the barrier layer. The IC structure also includes a crack stop area which includes a crack stop structure having an equal plurality of levels as the interconnect structure. Each of the crack stop structure levels includes at least one of the layers of the interconnection structure at a same level. At least one crack stop structure level also includes a high modulus layer unique to the crack stop structure level as compared to the corresponding interconnect structure level. In another aspect of the invention, a method for producing the structure is described.
Public/Granted literature
- US20190304928A1 ADVANCED CRACK STOP STRUCTURE Public/Granted day:2019-10-03
Information query
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