Invention Grant
- Patent Title: Die bonding apparatus comprising an inert gas environment
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Application No.: US15160814Application Date: 2016-05-20
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Publication No.: US10475763B2Publication Date: 2019-11-12
- Inventor: Siu Wing Lau , Kin Yik Hung , Yuk Cheung Au , Wing Chiu Lai , Leo Man Lee , Sai Yuen Go
- Applicant: ASM Technology Singapore Pte Ltd
- Applicant Address: SG Singapore
- Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
- Current Assignee: ASM TECHNOLOGY SINGAPORE PTE LTD
- Current Assignee Address: SG Singapore
- Agency: Ostrolenk Faber LLP
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L23/00 ; H01L21/677

Abstract:
A die bonding apparatus comprising a first inert gas container having a first inert gas concentration, and a second inert gas container having a second inert gas concentration enclosed within the first inert gas container. The second inert gas concentration is higher than the first inert gas concentration. The die bonding apparatus further comprises a bond head located in the second inert gas container for receiving a die for bonding, and a third inert gas container having an inert gas environment that is separate from the first and second inert gas containers and where a substrate is locatable for die bonding. The bond head is operative to move the die between a first position within the second inert container and a second position within the third inert gas container to bond the die onto the substrate located in the third inert gas container.
Public/Granted literature
- US20160351527A1 DIE BONDING APPARATUS COMPRISING AN INERT GAS ENVIRONMENT Public/Granted day:2016-12-01
Information query
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