Invention Grant
- Patent Title: Method of producing an integrated power transistor circuit having a current-measuring cell
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Application No.: US15458459Application Date: 2017-03-14
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Publication No.: US10475919B2Publication Date: 2019-11-12
- Inventor: Britta Wutte
- Applicant: Infineon Technologies Austria AG
- Applicant Address: AT Villach
- Assignee: Infineon Technologies Austria AG
- Current Assignee: Infineon Technologies Austria AG
- Current Assignee Address: AT Villach
- Agency: Murphy, Bilak & Homiller, PLLC
- Priority: DE102012102533 20120323
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L29/40 ; H01L29/66 ; H01L29/78 ; H01L29/417

Abstract:
A method for producing an integrated power transistor circuit includes forming at least one transistor cell in a cell array, each transistor cell having a doped region formed in a semiconductor substrate and adjoining a first surface of the semiconductor substrate on a first side of the semiconductor substrate, depositing a contact layer on the first side, structuring the contact layer to form a contact structure from the contact layer, the contact structure having, in a projection of the cell array orthogonal to the first surface, a first section and, outside the cell array, a second section which connects the first section to an interface structure, and forming an electrode structure on and in direct contact with the first section in the orthogonal projection of the cell array, the electrode structure being absent outside the cell array.
Public/Granted literature
- US20170186863A1 Method of Producing an Integrated Power Transistor Circuit Having a Current-Measuring Cell Public/Granted day:2017-06-29
Information query
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