Invention Grant
- Patent Title: Method for producing a reflective optical element, reflective optical element, and use of a reflective optical element
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Application No.: US15650141Application Date: 2017-07-14
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Publication No.: US10481501B2Publication Date: 2019-11-19
- Inventor: Markus Bauer , Ulrich Bingel , Willi Anderl
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102015100918 20150122
- Main IPC: G02B7/182
- IPC: G02B7/182 ; G03F7/20 ; C25D7/08 ; G02B7/18 ; G02B5/08 ; G02B5/18 ; G21K1/06

Abstract:
The disclosure provides a method that includes filling a cavity in a substrate with a second material, wherein the substrate includes a first material. The method also includes using galvanic and/or chemical deposition of a third material to apply an overcoating to a first surface of the substrate in a region of the cavity. The method further includes removing the second material from the cavity. In addition, the method includes, before or after removing the second material from the cavity, applying a reflective layer to the overcoating. The disclosure also provides related optical articles and systems.
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