An electrostatic chuck heater includes an electrostatic chuck in which an electrostatic electrode is embedded in a ceramic sintered body; a small-zone formation region including a plurality of small zones in which small heater electrodes are wired; a power source to which the plurality of small heater electrodes are connected in parallel; and a small-zone control apparatus that performs control such that desired electric power is supplied to each of the small heater electrodes, wherein among the plurality of small heater electrodes, a small heater electrode that is wired in a small zone including a cool spot has a resistance that is set to a smaller value than that of the other small heater electrodes.