Invention Grant
- Patent Title: Methods of forming replacement gate structures on transistor devices
-
Application No.: US15797723Application Date: 2017-10-30
-
Publication No.: US10483369B2Publication Date: 2019-11-19
- Inventor: Haigou Huang , Xusheng Wu , Jinsheng Gao
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/8234 ; H01L27/088 ; H01L21/8238

Abstract:
One illustrative method disclosed herein includes, among other things, forming a sacrificial gate structure above a semiconductor substrate, the sacrificial gate structure comprising a sacrificial gate insulation layer and a multi-layer sacrificial gate electrode structure, removing the sacrificial gate structure to form a replacement gate cavity, and forming a replacement gate structure in the replacement gate cavity.
Public/Granted literature
- US20190131428A1 METHODS OF FORMING REPLACEMENT GATE STRUCTURES ON TRANSISTOR DEVICES Public/Granted day:2019-05-02
Information query
IPC分类: