Invention Grant
- Patent Title: Method of manufacturing solar cell
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Application No.: US15713586Application Date: 2017-09-22
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Publication No.: US10483429B2Publication Date: 2019-11-19
- Inventor: Keiichiro Masuko
- Applicant: Panasonic Intellectual Property Management Co., Ltd.
- Applicant Address: JP Osaka
- Assignee: Panasonic Intellectual Property Management Co., Ltd.
- Current Assignee: Panasonic Intellectual Property Management Co., Ltd.
- Current Assignee Address: JP Osaka
- Agency: McDermott Will & Emery LLP
- Priority: JP2015-061278 20150324
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L31/20 ; H01L31/0747 ; H01L31/0216 ; H01L31/0224 ; H01L31/0376

Abstract:
A method of manufacturing a solar cell includes: providing an insulating layer on a semiconductor layer provided on at least a part of a principle surface of a semiconductor substrate; providing a mask layer on the insulating layer; removing a part of the mask layer by laser irradiation so as to form a first opening through which the insulating layer is exposed; and removing, by an etching agent, the insulating layer exposed through the first opening so as to form a second opening through which the semiconductor layer is exposed.
Public/Granted literature
- US20180019368A1 METHOD OF MANUFACTURING SOLAR CELL Public/Granted day:2018-01-18
Information query
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