Invention Grant
- Patent Title: Electrostatically deflectable micromechanical device
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Application No.: US14968635Application Date: 2015-12-14
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Publication No.: US10483876B2Publication Date: 2019-11-19
- Inventor: Sergiu Langa , Holger Conrad , Harald Schenk , Michael Stolz
- Applicant: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Applicant Address: DE
- Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
- Current Assignee: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
- Current Assignee Address: DE
- Agency: Haynes and Boone, LLP
- Main IPC: H02N1/08
- IPC: H02N1/08 ; H02N1/00 ; B81B3/00 ; H02N1/06

Abstract:
A micromechanical device with electrostatically caused deflection by a plate capacitor extending along and spaced apart from the neutral fiber of the deflectable element is improved with regard to its manufacturing complexity and/or with regard to its operating characteristics, such as, for example, maximum voltage applicable or deflectability, by using a continuous insulation layer between the distal and proximal electrodes of the plate capacitor, or else the proximal electrode is structured so as to have gaps at the segment boundaries where the distal electrode is mechanically fixed so as to be laterally spaced apart from the distal electrode. Both procedures avoid the problems of generating a roughness of the surface of the proximal electrode facing the distal electrode, as would otherwise be necessitated by etching an insulation layer for providing spacers between the distal and proximal electrodes at the segment boundaries.
Public/Granted literature
- US20160173001A1 ELECTROSTATICALLY DEFLECTABLE MICROMECHANICAL DEVICE Public/Granted day:2016-06-16
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