Invention Grant
- Patent Title: Acoustic wave device and method of manufacturing the same
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Application No.: US15388188Application Date: 2016-12-22
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Publication No.: US10483941B2Publication Date: 2019-11-19
- Inventor: Yohei Shimizu
- Applicant: TAIYO YUDEN CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Chen Yoshimura LLP
- Priority: JP2016-003701 20160112
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/64 ; H01L41/253

Abstract:
An acoustic wave device includes: a piezoelectric substrate; an IDT that is formed on the piezoelectric substrate and includes a pair of comb-shaped electrodes facing each other, each of the pair of comb-shaped electrodes including an grating electrode that excites an acoustic wave and a bus bar to which the grating electrode is connected; and reforming regions that are located only inside the piezoelectric substrate and arranged at intervals under the IDT, and in which a material of the piezoelectric substrate is reformed.
Public/Granted literature
- US20170201227A1 ACOUSTIC WAVE DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2017-07-13
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