Invention Grant
- Patent Title: X-ray apparatus and structure production method
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Application No.: US15502120Application Date: 2014-08-07
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Publication No.: US10502699B2Publication Date: 2019-12-10
- Inventor: Toshihisa Tanaka , Shinsuke Takeda , Naoshi Sakaguchi
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Nikon Corporation
- Current Assignee: Nikon Corporation
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- International Application: PCT/JP2014/070941 WO 20140807
- International Announcement: WO2016/021030 WO 20160211
- Main IPC: G01N23/04
- IPC: G01N23/04 ; G01N23/046 ; G01N23/083

Abstract:
An X-ray apparatus includes: a mounting unit upon which an object to be measured is mounted; an X-ray generation unit that irradiates X-rays, from above the mounting unit or from below the mounting unit, to the object to be measured upon the mounting unit; an X-ray detector that acquires a transmission image of the object to be measured being irradiated by the X-rays; a first movement unit that moves at least one of the mounting unit, the X-ray generation unit, and the X-ray detector along a direction of irradiation of the X-rays; a position detection unit that detects a relative position of the mounting unit, the X-ray generation unit, and the X-ray detector; and a calculation unit that calculates a magnification of a transmission image of the object to be measured acquired by the X-ray detector, in a state in which deflection of the mounting unit has occurred while the object to be measured is mounted upon the mounting unit.
Public/Granted literature
- US10571412B2 X-ray apparatus and structure production method Public/Granted day:2020-02-25
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