Invention Grant
- Patent Title: Blocker plate for use in a substrate process chamber
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Application No.: US15663734Application Date: 2017-07-29
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Publication No.: US10508339B2Publication Date: 2019-12-17
- Inventor: Xiaoxiong Yuan , Yu Lei , Yi Xu , Kazuya Daito , Pingyan Lei , Dien-Yeh Wu , Umesh M. Kelkar , Vikash Banthia
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: C23C16/455
- IPC: C23C16/455 ; H01L21/67
Abstract:
Embodiments of a blocker plate for use in a substrate process chamber are disclosed herein. In some embodiments, a blocker plate for use in a substrate processing chamber configured to process substrates having a given diameter includes: an annular rim; a central plate disposed within the annular rim; and a plurality of spokes coupling the central plate to the annular rim.
Public/Granted literature
- US20180347043A1 BLOCKER PLATE FOR USE IN A SUBSTRATE PROCESS CHAMBER Public/Granted day:2018-12-06
Information query
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