Invention Grant
- Patent Title: Memory device and method for fabricating the same
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Application No.: US15652310Application Date: 2017-07-18
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Publication No.: US10510765B2Publication Date: 2019-12-17
- Inventor: Yun-Chi Wu , Chung-Jen Huang
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H01L27/11568
- IPC: H01L27/11568 ; H01L21/8234 ; H01L21/28 ; H01L29/423 ; H01L29/66 ; H01L29/792 ; H01L27/1157 ; H01L27/11573

Abstract:
A memory device and a method for fabricating the same are provided. The memory device includes a semiconductor substrate, well regions, logic transistors, a high-voltage transistor, and a storage transistor. The well regions are disposed in the semiconductor substrate and include logic well regions, a high-voltage well region, and a memory well region. The logic transistors are disposed on the logic well regions. Each the logic transistors includes a high-k metal gate structure. The storage transistor is disposed on the memory well region, and includes a charge storage structure and a high-k metal gate structure. In the method for fabricating the memory device, a high-k first process or high-k last process is used for the formation of the high-k metal gate structures of the memory device. Because all the logic transistors and the storage transistor are formed with the high-k metal gate structure, a number of masks is decreased.
Public/Granted literature
- US20190027486A1 MEMORY DEVICE AND METHOD FOR FABRICATING THE SAME Public/Granted day:2019-01-24
Information query
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