Invention Grant
- Patent Title: Semiconductor image sensor
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Application No.: US15928748Application Date: 2018-03-22
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Publication No.: US10510788B2Publication Date: 2019-12-17
- Inventor: Keng-Yu Chou , Wei-Chieh Chiang , Chen-Jong Wang , Chien-Hsien Tseng , Kazuaki Hashimoto
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, P.C., Intellectual Property Attorneys
- Agent Anthony King
- Main IPC: H01L31/0232
- IPC: H01L31/0232 ; H01L27/146

Abstract:
A BSI image sensor includes a substrate including a front side and a back side opposite to the front side, a plurality of pixel sensors arranged in an array, an isolation grid disposed in the substrate and separating the plurality of pixel sensors from each other, and a reflective grid disposed over the isolation grid on the back side of the substrate. A depth of the reflective grid is less than a depth of the isolation grid.
Public/Granted literature
- US20190131327A1 SEMICONDUCTOR IMAGE SENSOR Public/Granted day:2019-05-02
Information query
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