Invention Grant
- Patent Title: Transistor with source field plates under gate runner layers
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Application No.: US16213013Application Date: 2018-12-07
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Publication No.: US10510847B2Publication Date: 2019-12-17
- Inventor: Hiroyuki Tomomatsu , Hiroshi Yamasaki , Sameer Pendharkar
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Tuenlap Chan; Charles A. Brill; Frank D. Cimino
- Main IPC: H01L29/40
- IPC: H01L29/40 ; H01L29/20 ; H01L29/41 ; H01L29/45 ; H01L29/49 ; H01L29/778 ; H01L27/06 ; H01L29/417

Abstract:
A transistor device includes a field plate extending from a source contact layer and defining an opening above a gate metal layer. Coplanar with the source contact layer, the field plate is positioned close to the channel region, which helps reduce its parasitic capacitance. Meanwhile, the opening allows a gate runner layer above the field plate to access and connect to the gate metal layer, which helps reduce the resistance of the gate structure. By vertically overlapping the metal gate layer, the field plate, and the gate runner layer, the transistor device may achieve fast switching performance without incurring any size penalty.
Public/Granted literature
- US20190109195A1 TRANSISTOR WITH SOURCE FIELD PLATES UNDER GATE RUNNER LAYERS Public/Granted day:2019-04-11
Information query
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