Invention Grant
- Patent Title: Commissioning method and vapor deposition machine
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Application No.: US15737311Application Date: 2017-10-20
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Publication No.: US10510959B2Publication Date: 2019-12-17
- Inventor: Qian Jiang
- Applicant: Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
- Applicant Address: CN Wuhan, Hubei
- Assignee: Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
- Current Assignee: Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
- Current Assignee Address: CN Wuhan, Hubei
- Agent Andrew C. Cheng
- Priority: CN201710738931 20170822
- International Application: PCT/CN2017/106986 WO 20171020
- International Announcement: WO2019/037223 WO 20190228
- Main IPC: C23C14/24
- IPC: C23C14/24 ; H01L51/00 ; C23C14/04 ; C23C14/54 ; H01L51/56

Abstract:
The present invention discloses a commissioning method and a vapor deposition machine, the method is used for adjusting the relative position of a precision mask plate and a substrate to be operated, which comprises: loading a commissioning substrate into a vapor deposition chamber for commissioning; loading a precision mask plate into the vapor deposition chamber for commissioning; turning on the light source in the vapor deposition chamber for commissioning, and irradiating the photochromic layer on the commissioning substrate via the precision mask plate, wherein a partial position of the irradiated photochromic layer is discolored; obtaining a compensation value of the precision mask plate by the location of a partial discolored position of the photochromic layer. The method is possible to omit the organic materials during the commissioning process, and increase the commissioning speed.
Public/Granted literature
- US20190067581A1 COMMISSIONING METHOD AND VAPOR DEPOSITION MACHINE Public/Granted day:2019-02-28
Information query
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