- Patent Title: Laser processing apparatus and method for manufacturing the same
-
Application No.: US15809537Application Date: 2017-11-10
-
Publication No.: US10515832B2Publication Date: 2019-12-24
- Inventor: Emil Aslanov , Je Kil Ryu , Hae Sook Lee , Young Geun Cho , Gyoo Wan Han
- Applicant: Samsung Display Co. Ltd.
- Applicant Address: KR Gyeonggi-Do
- Assignee: SAMSUNG DISPLAY CO. LTD.
- Current Assignee: SAMSUNG DISPLAY CO. LTD.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Cantor Colburn LLP
- Priority: KR10-2016-0164596 20161205
- Main IPC: H01L21/67
- IPC: H01L21/67 ; G02B19/00 ; G02B27/12 ; B23K26/06 ; G02B26/08 ; G02B27/09 ; H01L27/12 ; H01L21/02 ; G02B27/00 ; G02B3/00 ; B23K26/067 ; B23K103/00

Abstract:
A laser processing apparatus includes a laser beam generating unit which emits a laser beam, a lens unit which divides the laser beam into a plurality of laser beams, and a light condensing unit which condenses the plurality of laser beams. The lens unit includes a first lens array having a first central axis and a second lens array having a second central axis, and wherein at least one of the first lens array and the second lens array reciprocates such that the first central axis and the second central axis are deviated from each other.
Public/Granted literature
- US20180158703A1 LASER PROCESSING APPARATUS AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2018-06-07
Information query
IPC分类: