Invention Grant
- Patent Title: Susceptor and method for manufacturing same
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Application No.: US15321421Application Date: 2015-06-01
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Publication No.: US10522386B2Publication Date: 2019-12-31
- Inventor: Masato Shinohara , Yoshihisa Abe , Satoru Nogami
- Applicant: TOYO TANSO CO., LTD.
- Applicant Address: JP Osaka-shi
- Assignee: TOYO TANSO CO., LTD.
- Current Assignee: TOYO TANSO CO., LTD.
- Current Assignee Address: JP Osaka-shi
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2014-128957 20140624
- International Application: PCT/JP2015/065763 WO 20150601
- International Announcement: WO2015/198798 WO 20151230
- Main IPC: B23Q3/00
- IPC: B23Q3/00 ; H01L21/687 ; C23C16/04 ; C23C16/458 ; C23C16/56 ; H01L21/205 ; C23C8/20 ; C23C16/06 ; C23C16/32 ; C30B25/12

Abstract:
Provided are a susceptor that, in forming a thin film on a wafer, can reduce impurities or the like adhering to the wafer and a method for manufacturing the same. A susceptor includes a base material (10) with a recess (11), a tantalum carbide layer (22) formed directly on a bottom surface (11a) and a side surface (11b) of the recess (11), and a silicon carbide layer (20) formed on a surface of the base material (10) except for the recess (11).
Public/Granted literature
- US20170162425A1 SUSCEPTOR AND METHOD FOR MANUFACTURING SAME Public/Granted day:2017-06-08
Information query
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