Invention Grant
- Patent Title: Method of forming source/drain contact
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Application No.: US16229260Application Date: 2018-12-21
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Publication No.: US10522413B2Publication Date: 2019-12-31
- Inventor: Ming-Jhih Kuo , Yu-Hsien Lin , Hung-Chang Hsieh , Jhun Hua Chen
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW
- Agency: Haynes and Boone, LLP
- Main IPC: H01L21/8234
- IPC: H01L21/8234 ; H01L21/311 ; H01L27/088 ; H01L29/49 ; H01L29/51 ; H01L29/66 ; H01L21/768 ; H01L29/165

Abstract:
Methods are disclosed herein for fabricating semiconductor devices having shared source/drain contacts. An exemplary semiconductor device includes a high-k/metal gate stack disposed over a substrate. The high-k/metal gate stack is disposed between a first source/drain feature and a second source/drain feature. A first spacer set is disposed along sidewalls of the high-k/metal gate stack. A first interlevel dielectric (ILD) layer is disposed over the substrate. Upper portions of the first spacer set that extend above the first ILD layer have a tapered width. A second spacer set is disposed on the upper portions of the first spacer set and over the first ILD layer. A second ILD layer is disposed over the first ILD layer. A contact feature extends through the second ILD layer to the first source/drain feature and the second source/drain feature. The contact feature spans uninterrupted between the first source/drain feature and the second source/drain feature.
Public/Granted literature
- US20190115262A1 Method of Forming Source/Drain Contact Public/Granted day:2019-04-18
Information query
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