Invention Grant
- Patent Title: Method of fabricating vertical transistor device
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Application No.: US15980604Application Date: 2018-05-15
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Publication No.: US10522552B2Publication Date: 2019-12-31
- Inventor: Julien Ryckaert , Naoto Horiguchi , Dan Mocuta , Trong Huynh Bao
- Applicant: IMEC VZW
- Applicant Address: BE Leuven
- Assignee: IMEC vzw
- Current Assignee: IMEC vzw
- Current Assignee Address: BE Leuven
- Agency: Knobbe Martens Olson & Bear, LLP
- Priority: EP17171130 20170515
- Main IPC: H01L21/8234
- IPC: H01L21/8234 ; H01L27/11 ; H01L27/088 ; H01L29/66 ; H01L29/417 ; H01L29/78 ; H01L21/8238 ; H01L27/092 ; H01L29/786

Abstract:
The disclosed technology generally relates semiconductor devices and more particularly to a vertical transistor device, and a method of fabricating the same. In one aspect, the method includes providing, on a substrate, a fin formed of a stack of a first layer, a second layer and a third layer, wherein the second layer is positioned above the first layer and the third layer is positioned above the second layer. The method additionally includes forming a dielectric on the sidewalls of the first and third layers of the fin selectively against a sidewall of the second layer, and the method additionally includes forming a gate contacting layer for contacting a sidewall of the second layer. The first and third layers define a source region and a drain region, respectively, of the vertical transistor device. The second layer defines a channel region of the vertical transistor device. The dielectric on the sidewalls of the first and third layers electrically isolates the source and drain regions from the gate contacting layer.
Public/Granted literature
- US20180342524A1 METHOD OF FABRICATING VERTICAL TRANSISTOR DEVICE Public/Granted day:2018-11-29
Information query
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