Invention Grant
- Patent Title: Silicon carbide epitaxial wafer, silicon carbide insulated gate bipolar transistor, and method of manufacturing the same
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Application No.: US15963698Application Date: 2018-04-26
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Publication No.: US10522667B2Publication Date: 2019-12-31
- Inventor: Takeshi Tawara , Hidekazu Tsuchida , Koichi Murata
- Applicant: FUJI ELECTRIC CO., LTD.
- Applicant Address: JP Kawasaki
- Assignee: FUJI ELECTRIC CO., LTD.
- Current Assignee: FUJI ELECTRIC CO., LTD.
- Current Assignee Address: JP Kawasaki
- Priority: JP2017-089845 20170428
- Main IPC: H01L29/739
- IPC: H01L29/739 ; H01L29/16 ; H01L21/02 ; H01L29/66 ; H01L29/36 ; H01L29/10

Abstract:
The SiC-IGBT includes a p-type collector layer, an n−-type voltage-blocking-layer provided on the collector layer, p-type base regions provided on the n−-type voltage-blocking-layer, n+-type emitter regions provided in an upper portion of the p-type base region, a gate insulating film provided in an upper portion of the voltage-blocking-layer, and a gate electrode provided on the gate insulating film. The p-type buffer layer has thickness of five micrometers or more and 20 micrometers or less and is doped with Al at impurity concentration of 5×1017 cm−3 or more and 5×1018 cm−3 or less and doped with B at impurity concentration of 2×1016 cm−3 or more and less than 5×1017 cm−3.
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