Invention Grant
- Patent Title: MEMS actuation systems and methods
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Application No.: US15699007Application Date: 2017-09-08
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Publication No.: US10523135B2Publication Date: 2019-12-31
- Inventor: Matthew Ng , Xiaolei Liu , Guiqin Wang
- Applicant: MEMS Drive, Inc.
- Applicant Address: US CA Arcadia
- Assignee: MEMS Drive, Inc.
- Current Assignee: MEMS Drive, Inc.
- Current Assignee Address: US CA Arcadia
- Agency: Holland & Knight LLP
- Agent Brian J. Colandreo; Michael T. Abramson
- Main IPC: H02N1/00
- IPC: H02N1/00 ; B81B3/00 ; B81C1/00 ; H02N1/06 ; H02N2/02 ; H01L41/053 ; G02B27/64 ; B81B7/00 ; H01L41/09 ; H01L41/25 ; H04N5/225 ; G02B7/09 ; G02B7/10
Abstract:
A method of manufacturing a micro-electrical-mechanical system (MEMS) assembly includes mounting a micro-electrical-mechanical system (MEMS) actuator to a metal plate. An image sensor assembly is mounted to the micro-electrical-mechanical system (MEMS) actuator. The image sensor assembly is electrically coupled to the micro-electrical-mechanical system (MEMS) actuator, thus forming a micro-electrical-mechanical system (MEMS) subassembly.
Public/Granted literature
- US20180072565A1 MEMS ACTUATION SYSTEMS AND METHODS Public/Granted day:2018-03-15
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