Invention Grant
- Patent Title: Chemical-mechanical polishing abrasive pad conditioner and method for manufacturing same
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Application No.: US15883656Application Date: 2018-01-30
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Publication No.: US10525567B2Publication Date: 2020-01-07
- Inventor: Jui-Lin Chou , Chin-Chung Chou , Chung-Yi Cheng , Hsin-Chun Wang , Yu-Chau Hung
- Applicant: Kinik Company Ltd.
- Applicant Address: TW Taipei
- Assignee: KINIK COMPANY LTD.
- Current Assignee: KINIK COMPANY LTD.
- Current Assignee Address: TW Taipei
- Agency: Muncy, Geissler, Olds & Lowe, P.C.
- Priority: TW106115709A 20170512
- Main IPC: B24B53/017
- IPC: B24B53/017 ; B24B53/00 ; B24D18/00 ; C08K3/22 ; C08K3/02 ; C30B29/36

Abstract:
The present invention provides a CMP abrasive pad conditioner, comprising a bottom substrate; an intermediate layer located on the bottom substrate, the intermediate layer including a hollow portion and an annular portion surrounding the hollow portion, the annular portion being provided with a plurality of bumps; and a diamond film located on the intermediate layer, and forming a plurality of abrasive projections corresponding to the bumps of the intermediate layer; in this case, a top surface of the abrasive projections is formed with a patterned configuration and the top surface is provided with a center line average roughness (Ra) between 2 and 20.
Public/Granted literature
- US20180326553A1 CHEMICAL-MECHANICAL POLISHING ABRASIVE PAD CONDITIONER AND METHOD FOR MANUFACTURING SAME Public/Granted day:2018-11-15
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