Invention Grant
- Patent Title: Magnetic structure for metal plating control
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Application No.: US13971881Application Date: 2013-08-21
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Publication No.: US10526719B2Publication Date: 2020-01-07
- Inventor: Ming-Chin Tsai , Chung-En Kao , Victor Y. Lu
- Applicant: Taiwan Semiconductor Manufacturing Company Limited
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
- Current Assignee Address: TW Hsin-Chu
- Agency: Cooper Legal Group, LLC
- Main IPC: C25D17/00
- IPC: C25D17/00 ; C25D5/00 ; C25D7/12

Abstract:
Among other things, one or more systems and techniques for promoting metal plating profile uniformity are provided. A magnetic structure is positioned relative to a semiconductor wafer that is to be electroplated with metal during a metal plating process. In an embodiment, the magnetic structure applies a force that decreases an edge plating current by moving metal ions away from a wafer edge of the semiconductor wafer. In an embodiment, the magnetic structure applies a force that increases a center plating current by moving metal ions towards a center portion of the semiconductor wafer. In this way, the edge plating current has a current value that is similar to a current value of the center plating current. The similarity between the center plating current and the edge plating current promotes metal plating uniformity.
Public/Granted literature
- US20150053563A1 MAGNETIC STRUCTURE FOR METAL PLATING CONTROL Public/Granted day:2015-02-26
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