A workpiece transfer apparatus for a furnace includes a carrier having access to a furnace and carrying a workpiece placed thereon, a controller for controlling movement of the carrier, the controller for determining an amount of deformation of the carrier by heat of the furnace, and the controller for determining an adjustment to the attitude of the carrier on the basis of the amount of deformation of the carrier, wherein when handing over the workpiece for a next process tool, the carrier is moved into an adjusted attitude.