Invention Grant
- Patent Title: Measuring device for interferometric determination of a shape of an optical surface
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Application No.: US16251703Application Date: 2019-01-18
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Publication No.: US10527403B2Publication Date: 2020-01-07
- Inventor: Jochen Hetzler
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: CARL ZEISS SMT GMBH
- Current Assignee: CARL ZEISS SMT GMBH
- Current Assignee Address: DE Oberkochen
- Agency: Edell, Shapiro & Finnan, LLC
- Priority: DE102016213237 20160720
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B11/24 ; G01M11/02

Abstract:
A measurement apparatus (10) for determining a shape of an optical surface. An illumination module (16) produces an illumination wave (34), an interferometer (18) splits the wave into a test wave (50), which is directed onto the optical surface, and a reference wave (52). The relative tilt between the waves produces a multi-fringe interference pattern (66) in a detection plane (62) of the interferometer when the waves are superposed. A pupil plane (28) of the illumination module is arranged in a Fourier plane of the detection plane and the illumination module is configured to produce the illumination wave so that the intensity distribution thereof in the pupil plane includes at least one spatially isolated and contiguous surface region (38) such that a rectangle (74) with the smallest possible area fitted to the surface region or the totality of surface regions has an aspect ratio of at least 1.5:1.
Public/Granted literature
- US20190154427A1 MEASURING DEVICE FOR INTERFEROMETRIC DETERMINATION OF A SHAPE OF AN OPTICAL SURFACE Public/Granted day:2019-05-23
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