A device for measuring superfine particles masses includes an exposure system with at least two measurement chambers having an identical geometry. Each measurement chamber has a deposition surface for the superfine particles which each have an aerosol feed line. The aerosol feed line has an outlet region to feed an aerosol onto the deposition surface, a means for generating a potential difference between the superfine particles in the aerosol and the deposition surface, and a grid arranged above the deposition surface. The outlet region has a widened outlet cross section having a constant distance from the deposition surface. At least one deposition surface is arranged on a piezoelectric crystal as a superfine balance. A first potential corresponding to a ground potential is present at each deposition surface. A second potential having a potential difference of at least 200 V in relation to the first potential is present at each grid.