Invention Grant
- Patent Title: Acceleration sensor
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Application No.: US15511444Application Date: 2014-11-11
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Publication No.: US10527642B2Publication Date: 2020-01-07
- Inventor: Atsushi Isobe , Noriyuki Sakuma , Chisaki Takubo , Yuudai Kamada , Takashi Shiota
- Applicant: HITACHI, LTD.
- Applicant Address: JP Tokyo
- Assignee: HITACHI, LTD.
- Current Assignee: HITACHI, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge, PC
- International Application: PCT/JP2014/079895 WO 20141111
- International Announcement: WO2016/075761 WO 20160519
- Main IPC: G01P15/12
- IPC: G01P15/12 ; G01P15/125

Abstract:
An acceleration sensor (1) includes a fixed portion (33), a movable portion (31) connected to the fixed portion (33), a lower electrode (11) that is disposed to face a lower surface of the movable portion (31), and an upper electrode (21) that is disposed to face an upper surface of the movable portion (31). A distance in an x-axis direction between an end portion (41) of the lower electrode (11) and the fixed portion (33) is shorter than a distance in the x-axis direction between an end portion (51) of the upper electrode (21) and the fixed portion (33). Further, a distance in the x-axis direction between an end portion (42) of the lower electrode (11) and the fixed portion (33) is shorter than a distance in the x-axis direction between an end portion (52) of the upper electrode (21) and the fixed portion (33).
Public/Granted literature
- US20170292970A1 ACCELERATION SENSOR Public/Granted day:2017-10-12
Information query
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