Invention Grant
- Patent Title: Detection method and detection device of process corner of mos transistor
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Application No.: US15899567Application Date: 2018-02-20
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Publication No.: US10527667B2Publication Date: 2020-01-07
- Inventor: Cheng-Tai Huang , Chia Chi Yang , Chen-Yi Huang
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation , Semiconductor Manufacturing International (Beijing) Corporation
- Applicant Address: CN Shanghai CN Beijing
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation,Semiconductor Manufacturing International (Beijing) Corporation
- Current Assignee Address: CN Shanghai CN Beijing
- Agency: Anova Law Group, PLLC
- Priority: CN201710106247 20170224
- Main IPC: G01R31/26
- IPC: G01R31/26 ; H03K3/03 ; H01L21/66 ; G01R31/28

Abstract:
Method and device for detecting the process corner of a transistor are provided. The process corner detection method includes providing a ring oscillator. The ring oscillator includes an odd number of oscillation units connected in series and an output port of one of the oscillation units serves as the output port of the ring oscillator to output an oscillation signal. Each oscillation unit is constructed based on a PMOS transistor and an NMOS transistor. The process corner detection method further includes measuring the period of the oscillation signal and the maintaining time of the oscillation signal at a high level and a low level in each cycle; and determining the process corner of the PMOS transistor and the NMOS transistor in the oscillation unit based on the period of the oscillation signal and the maintaining time of the oscillation signal at a high level and a low level in each cycle.
Public/Granted literature
- US20180246160A1 DETECTION METHOD AND DETECTION DEVICE OF PROCESS CORNER OF MOS TRANSISTOR Public/Granted day:2018-08-30
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