Invention Grant
- Patent Title: Optical processing apparatus, coating/development apparatus, optical processing method, and non-transitory computer-readable storage medium
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Application No.: US15828870Application Date: 2017-12-01
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Publication No.: US10527948B2Publication Date: 2020-01-07
- Inventor: Seiji Nagahara , Masaru Tomono , Nobutaka Fukunaga , Gousuke Shiraishi
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Minato-Ku
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Minato-Ku
- Agency: Burr & Brown, PLLC
- Priority: JP2016-246677 20161220
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H01L21/027

Abstract:
An illuminance distribution response amount as the change amount of the illuminance distribution pattern, associating the position in the irradiation region in the lengthwise direction with the change amount of the illuminance with respect to the change in the drive current, has previously been acquired and stored in a storage unit for each light-emitting block. There is provided an arithmetic processing unit that determines (estimates) a current command value of each of the light-emitting blocks based on a present current command value of each of the light-emitting blocks and the change amount of the illuminance distribution pattern of each light-emitting block in order to bring a present illuminance distribution pattern in the irradiation region in a lengthwise direction close to a target illuminance distribution pattern.
Public/Granted literature
Information query
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