Invention Grant
- Patent Title: Container storage add-on for bare workpiece stocker
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Application No.: US14513214Application Date: 2014-10-14
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Publication No.: US10529609B2Publication Date: 2020-01-07
- Inventor: Lutz Rebstock
- Applicant: Brooks CCS GmbH
- Applicant Address: DE
- Assignee: Brooks Automation (Germany) GmbH
- Current Assignee: Brooks Automation (Germany) GmbH
- Current Assignee Address: DE
- Agency: Perman & Green, LLP
- Agent Colin C. Durham
- Main IPC: H01L21/677
- IPC: H01L21/677 ; H01L21/687
Abstract:
The present invention relates to apparatuses and methods to store and transfer objects, and more particularly to workpiece stocker configurations such as stocker for semiconductor wafers, reticles or carrier boxes.
Public/Granted literature
- US20160247701A1 Container storage add-on for bare workpiece stocker Public/Granted day:2016-08-25
Information query
IPC分类:
