Invention Grant
- Patent Title: Integrated circuit nanoparticle thermal routing structure over interconnect region
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Application No.: US15361390Application Date: 2016-11-26
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Publication No.: US10529641B2Publication Date: 2020-01-07
- Inventor: Archana Venugopal , Benjamin Stassen Cook , Luigi Colombo , Robert Reid Doering
- Applicant: Texas Instruments Incorporated
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Michael A. Davis, Jr.; Charles A. Brill; Frank D. Cimino
- Main IPC: H01L23/367
- IPC: H01L23/367 ; H01L21/768 ; H01L23/373 ; H01L23/522

Abstract:
An integrated circuit has a thermal routing structure above a top interconnect level. The top interconnect level includes interconnects connected to lower interconnect levels, and does not include bond pads, probe pads, input/output pads, or a redistribution layer to bump bond pads. The thermal routing structure extends over a portion, but not all, of a plane of the integrated circuit containing the top interconnect level. The thermal routing structure includes a layer of nanoparticles in which adjacent nanoparticles are attached to each other. The layer of nanoparticles is free of an organic binder material. The thermal routing structure has a thermal conductivity higher than the metal in the top interconnect level. The layer of nanoparticles is formed by an additive process.
Public/Granted literature
- US20180151463A1 INTEGRATED CIRCUIT NANOPARTICLE THERMAL ROUTING STRUCTURE OVER INTERCONNECT REGION Public/Granted day:2018-05-31
Information query
IPC分类: