Invention Grant
- Patent Title: Method for forming a homogeneous bottom electrode via (BEVA) top surface for memory
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Application No.: US16202493Application Date: 2018-11-28
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Publication No.: US10529658B2Publication Date: 2020-01-07
- Inventor: Hsia-Wei Chen , Wen-Ting Chu , Yu-Wen Liao
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L23/498
- IPC: H01L23/498 ; H01L23/532 ; H01L45/00 ; H01L23/522 ; H01L43/08 ; H01L21/768 ; H01L43/12 ; G11C11/16

Abstract:
Various embodiments of the present application are directed towards an integrated circuit comprising a memory cell on a homogeneous bottom electrode via (BEVA) top surface. In some embodiments, the integrated circuit comprises a conductive wire, a via dielectric layer, a via, and a memory cell. The via dielectric layer overlies the conductive wire. The via extends through the via dielectric layer to the conductive wire, and has a first sidewall, a second sidewall, and a top surface. The first and second sidewalls of the via are respectively on opposite sides of the via, and directly contact sidewalls of the via dielectric layer. The top surface of the via is homogenous and substantially flat. Further, the top surface of the via extends laterally from the first sidewall of the via to the second sidewall of the via. The memory cell is directly on the top surface of the via.
Public/Granted literature
- US20190096795A1 METHOD FOR FORMING A HOMOGENEOUS BOTTOM ELECTRODE VIA (BEVA) TOP SURFACE FOR MEMORY Public/Granted day:2019-03-28
Information query
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