Invention Grant
- Patent Title: Non-volatile memory device having nanocrystal floating gate and method of fabricating same
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Application No.: US15890523Application Date: 2018-02-07
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Publication No.: US10529729B2Publication Date: 2020-01-07
- Inventor: Jean-Pierre Colinge , Carlos H Diaz
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
- Current Assignee Address: TW Hsinchu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L27/11551 ; H01L29/423 ; H01L29/41 ; H01L29/66 ; H01L29/49 ; H01L21/28 ; H01L29/786 ; B82Y10/00 ; H01L29/775 ; H01L29/40

Abstract:
Non-volatile memory devices and methods of fabricating thereof are disclosed herein. An exemplary non-volatile memory device includes a heterostructure disposed over a substrate. A gate structure traverses the heterostructure, such that the gate structure separates a source region and a drain region of the heterostructure and a channel region is defined between the source region and the drain region. The non-volatile memory device further includes a nanocrystal floating gate disposed in the channel region of the heterostructure between a first nanowire and a second nanowire. The first nanowire and the second nanowire extend between the source region and the drain region.
Public/Granted literature
- US20180166457A1 Non-Volatile Memory Device Having Nanocrystal Floating Gate and Method of Fabricating Same Public/Granted day:2018-06-14
Information query
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