Invention Grant
- Patent Title: Cell pillar structures and integrated flows
-
Application No.: US16253111Application Date: 2019-01-21
-
Publication No.: US10529776B2Publication Date: 2020-01-07
- Inventor: Fatma Arzum Simsek-Ege , Krishna K. Parat
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Schwegman Lundberg & Woessner, P.A.
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L45/00 ; H01L27/11553 ; H01L29/792 ; H01L29/788 ; H01L29/66 ; H01L27/1158

Abstract:
Various embodiments comprise apparatuses and methods, such as a memory stack having a continuous cell pillar. In various embodiments, the apparatus includes a source material, a buffer material, a select gate drain (SGD), and a memory stack arranged between the source material and the SGD. The memory stack comprises alternating levels of conductor materials and dielectric materials. A continuous channel-fill material forms a cell pillar that is continuous from the source material to at least a level corresponding to the SGD.
Public/Granted literature
- US20190273120A1 CELL PILLAR STRUCTURES AND INTEGRATED FLOWS Public/Granted day:2019-09-05
Information query
IPC分类: