Invention Grant
- Patent Title: Insulated-gate semiconductor device and method of manufacturing the same
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Application No.: US16170562Application Date: 2018-10-25
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Publication No.: US10529848B2Publication Date: 2020-01-07
- Inventor: Keiji Okumura
- Applicant: FUJI ELECTRIC CO., LTD.
- Applicant Address: JP Kawasaki
- Assignee: FUJI ELECTRIC CO., LTD.
- Current Assignee: FUJI ELECTRIC CO., LTD.
- Current Assignee Address: JP Kawasaki
- Priority: JP2017-238885 20171213
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/78 ; H01L29/66 ; H01L29/10 ; H01L29/45 ; H01L29/739 ; H01L29/16

Abstract:
An insulated-gate semiconductor device includes: an n-type current spreading layer provided on an n−-type drift layer; a p+-type base region provided on the current spreading layer; an n+-type source region provided in an upper portion of the base region; an insulated-gate electrode structure provided inside a trench; a p+-type gate-bottom protection-region provided in the current spreading layer so as to be in contact with a bottom of the trench; and a p+-type base-bottom buried-region buried in the current spreading layer, having a bottom surface having the same depth as a bottom surface of the gate-bottom protection-region, wherein the base-bottom buried-region is divided into a plurality of portions in a depth direction through an n-type separation layer.
Public/Granted literature
- US20190181261A1 INSULATED-GATE SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2019-06-13
Information query
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