Invention Grant
- Patent Title: Air gap metal tip electrostatic discharge protection
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Application No.: US15414099Application Date: 2017-01-24
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Publication No.: US10530150B2Publication Date: 2020-01-07
- Inventor: Qianwen Chen , Yang Liu , Dongbing Shao , Zheng Xu
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: H05F3/04
- IPC: H05F3/04 ; H02H9/04 ; H05F3/00 ; H05K1/02 ; H05K9/00 ; H01T4/10

Abstract:
An air gap metal tip structure is provided for ESD protection that includes a lower substrate and an upper substrate disposed above the lower substrate. The air gap metal tip structure includes a first and a second metal tip disposed along at least one horizontal axis that is parallel to the upper substrate and the lower substrate. The air gap metal tip structure includes an air chamber formed between the upper and lower substrates within which the first and second metal tips are disposed. The air chamber includes a portion between points of the metal tips. Oxygen trapped in the air chamber is converted into ozone responsive to an occurrence of an arc between the tips to dissipate the arc, and the ozone is decomposed back into the oxygen responsive to an absence of the arc between the tips to maintain the ESD protection for subsequent arcs.
Public/Granted literature
- US20180212423A1 AIR GAP METAL TIP ELECTROSTATIC DISCHARGE PROTECTION Public/Granted day:2018-07-26
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