Invention Grant
- Patent Title: Active MEMS damping
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Application No.: US15896607Application Date: 2018-02-14
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Publication No.: US10532923B2Publication Date: 2020-01-14
- Inventor: Jianmin Gong , Francis Man , Dongyu Geng , Xin Tu , Ming Li , Jiejiang Xing , Yusheng Bai
- Applicant: Futurewei Technologies, Inc.
- Applicant Address: US TX Plano
- Assignee: Futurewei Technologies, Inc.
- Current Assignee: Futurewei Technologies, Inc.
- Current Assignee Address: US TX Plano
- Agency: Conely Rose, P.C.
- Main IPC: B81B7/00
- IPC: B81B7/00 ; H02K33/16 ; G02B26/08 ; H02K33/18

Abstract:
Methods and apparatus for reducing the oscillation of a MEMS actuator. In one embodiment, a driving signal is generated to adjust the MEMS actuator through a set of driving wires coupled to the MEMS actuator. A motion-induced signal from the set of driving wires coupled to the MEMS actuator is received in response to the driving signal. The motion-induced signal is filtered to generate a filtered motion-induced signal. The filtered motion-induced signal is amplified to generate an amplified filtered motion-induced signal. The driving signal is adjusted based on the amplified filtered motion-induced signal to reduce the oscillation of the MEMS actuator.
Public/Granted literature
- US20190248647A1 Active MEMS Damping Public/Granted day:2019-08-15
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