Invention Grant
- Patent Title: Growth container
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Application No.: US15703342Application Date: 2017-09-13
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Publication No.: US10533265B2Publication Date: 2020-01-14
- Inventor: Takashi Sakurada , Tomohiro Kawase , Yoshiaki Hagi
- Applicant: SUMITOMO ELECTRIC INDUSTRIES, LTD.
- Applicant Address: JP Osaka-shi, Osaka
- Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee Address: JP Osaka-shi, Osaka
- Agency: Drinker Biddle & Reath LLP
- Priority: JP2010-075524 20100329
- Main IPC: C30B27/00
- IPC: C30B27/00 ; C30B11/00 ; C30B29/40

Abstract:
Relates to a method of producing a semiconductor crystal having generation of a defect suppressed in the semiconductor single crystal. The production method includes the steps of: forming a boron oxide film (31) on the inner wall of a growth container (10) having a bottom section and a body section continuous to the bottom section; bringing the boron oxide film (31) into contact with boron oxide melt containing silicon oxide to form a boron oxide film (32) containing silicon oxide on the inner wall of the growth container (10); forming raw material melt (34) above seed crystal (20) placed in and on the bottom section of the growth container (10); and solidifying the raw material melt (34) from the seed crystal (20) side to grow a semiconductor single crystal.
Public/Granted literature
- US20180010262A1 GROWTH CONTAINER Public/Granted day:2018-01-11
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