Invention Grant
- Patent Title: MEMS capacitive wall shear stress vector measurement system
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Application No.: US15906748Application Date: 2018-02-27
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Publication No.: US10533905B2Publication Date: 2020-01-14
- Inventor: Mark Sheplak , Casey B. Keane
- Applicant: University of Florida Research Foundation, Incorporated
- Applicant Address: US FL Gainesville
- Assignee: University of Florida Research Foundation, Incorporated
- Current Assignee: University of Florida Research Foundation, Incorporated
- Current Assignee Address: US FL Gainesville
- Agency: Alston & Bird LLP
- Main IPC: G01L1/14
- IPC: G01L1/14 ; C23C14/02 ; C23C14/18 ; C23C14/58 ; G03F7/42 ; G03F7/40 ; G03F7/16 ; C23C14/34 ; G03F7/20 ; G03F7/32 ; C23C14/16

Abstract:
Microelectromechanical systems (MEMS)-based devices capable of measuring wall shear stress vectors in three-dimensional aerodynamic flow fields are provided. A device can include a sensor that senses wall shear stress vectors in two in-plane axes and an interface circuit including a modulation section and a demodulation section. The device can be capable of making direct, real-time wall shear stress measurements without any need for using secondary measurements and/or models for validation.
Public/Granted literature
- US20180252600A1 MEMS CAPACITIVE WALL SHEAR STRESS VECTOR MEASUREMENT SYSTEM Public/Granted day:2018-09-06
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