Invention Grant
- Patent Title: Laser measuring device and laser ultrasonic device
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Application No.: US15653571Application Date: 2017-07-19
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Publication No.: US10533974B2Publication Date: 2020-01-14
- Inventor: Kazuo Ishiyama
- Applicant: Hitachi, Ltd.
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Mattingly & Malur, PC
- Priority: JP2016-184205 20160921
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01N29/24 ; G01N29/04 ; G01N29/07 ; G01N29/34

Abstract:
A laser measuring device includes a light source, a first splitter, a second splitter, first photodetection units, and second photodetection units. The light source emits laser light. The first splitter splits the laser light into light to be incident on a specimen and reference light that travels in a predetermined direction. The second splitter is where a combined wave formed by combining signal light reflected off the specimen and the reference light traveling in a direction different from the predetermined direction enters. The first photodetection units detect one part of the combined wave that has been transmitted through the second splitter. The second photodetection units detect another part of the combined wave that has been reflected off the second splitter. The first splitter has an asymmetric splitting ratio set such that power of the reference light becomes larger than power of the light to be incident on the specimen.
Public/Granted literature
- US20180080906A1 LASER MEASURING DEVICE AND LASER ULTRASONIC DEVICE Public/Granted day:2018-03-22
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