Invention Grant
- Patent Title: Chemically amplified positive resist composition and patterning process
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Application No.: US15334660Application Date: 2016-10-26
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Publication No.: US10534262B2Publication Date: 2020-01-14
- Inventor: Yoshinori Hirano , Hideyoshi Yanagisawa
- Applicant: SHIN-ETSU CHEMICAL CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee: SHIN-ETSU CHEMICAL CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2015-210328 20151027
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/40 ; G03F7/039 ; G06F7/40 ; G03F7/16 ; G03F7/20 ; G03F7/32

Abstract:
A chemically amplified positive resist composition is provided comprising a specific alkali-soluble polymer adapted to turn soluble in alkaline aqueous solution under the action of acid as base resin, an alkali-soluble polymer, and a photoacid generator in an organic solvent. The composition forms a resist film which can be briefly developed to form a pattern at a high sensitivity without generating dimples in pattern sidewalls.
Public/Granted literature
- US20170115567A1 Chemically Amplified Positive Resist Composition and Patterning Process Public/Granted day:2017-04-27
Information query
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