The present invention provides particle etching or depositing evolutionary simulation method and device. The method comprises: step 1. obtaining an initial profile; step 2. sampling a series of areas for the profile, and performing an evolution process on each of the series of area by using a micro etching or depositing method; step 3. obtaining macro profile evolution parameters based on a micro evolutionary computation result; step 4. performing macro profile evolutionary computation, comprising: performing profile evolutionary computation by using a macro profile evolution method based on the macro evolution parameters; and step 5, judging whether a termination condition is met, if yes, terminating evolution, and if not, repeating the steps 2-4. In the evolutionary simulation method according to embodiments of the present invention, a micro evolution condition is determined by macro computation, meanwhile, the micro evolution result is transferred to a macro process to determine macro evolution parameters, so that macro computation and micro computation are organically coupled, a trans-scale simulation problem is at least partially solved, and the simulation result is more accurate and rapid.